IEEE Transactions on Magnetics · 1986 · 12 citations · 14 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsMagnetic MaterialsThin FilmsFerromagnetismMagnetic AnisotropyMagnetic CharacterizationMagnetic Properties Of SolidsMagnetic Thin FilmsThin Film Magnetic PropertiesAnisotropy FieldAnisotropy In Thin FilmsCoercivityElectron Beam EvaporationMagnetic CoercivityMagnetic PropertiesPerpendicular Magnetic AnisotropySubstrate Temperature Effects
Perpendicular magnetic CoCr films were prepared on glass substrates using electron beam evaporation. The magnetic properties depend strongly on the substrate temperature, T <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> . The anisotropy field, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">H_{k}^{eff}</tex> , and the perpendicular coercivity, H <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</inf> ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\perp</tex> ) show maximum values at T <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> around 250°C. In this case, the alignment of c-axis is optimal and the grain size is smallest. The lattice spacing of the c-planes increases wlth T <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> until 300°C. When the films prepared below 200°C were annealed around 300°C in high vacuum, the saturation magnetization, M <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> , increased. The value of M <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> , however, decrease by annealing above 400°C. In spite of the decrease of M <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> due to the annealing above 400°C, <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">H_{k}^{eff}</tex> and H <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">c</inf> ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">\perp</tex> ) increase by annealing above 400°C. If the films were bombarded by argon ions during film growth, M <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</inf> decreased and the internal stress changed from tensile to compressive. For low substrate temperature (below 150°C), <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">H_{k}^{eff}</tex> decreased due to ion bombardment.
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Max Hansen, K. Anderko, H. W. Salzberg · Journal of The Electrochemical Society · 1958 · 14.8K citations
Internal stresses in sputtered chromium
David W. Hoffman, John A. Thornton · Thin Solid Films · 1977 · 216 citations
Natural Sciences, Materials Engineering, Materials Science +14