Displacement sensing of a micro-electro-thermal actuator using a monolithically integrated thermal sensor

Scanning thermal profiler

C. C. Williams, H. K. Wickramasinghe · Applied Physics Letters · 1986 · 405 citations

Engineering, Materials Engineering, Materials Science +17

MEMS actuators and sensors: observations on their performance and selection for purpose

Dominik J. Bell, Tian Jian Lu, N.A. Fleck et al. · Journal of Micromechanics and Microengineering · 2005 · 389 citations

Engineering, Materials Science, Mechanical Engineering +13

Time and frequency response of two-arm micromachined thermal actuators

Ryan Hickey, Dan Sameoto, Ted Hubbard et al. · Journal of Micromechanics and Microengineering · 2002 · 199 citations

Engineering, Mechanical Engineering, Actuators +14

Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator

Christian D. Lott, Timothy W. McLain, John N. Harb et al. · Sensors and Actuators A Physical · 2002 · 195 citations

Engineering, Mechanical Engineering, Heat Transfer +13

Size effect on single-phase channel flow and heat transfer at microscale

Zeng-Yuan Guo, Zhixin Li · International Journal of Heat and Fluid Flow · 2003 · 192 citations

Engineering, Mechanical Engineering, Physics +16