Time and frequency response of two-arm micromachined thermal actuators

Abstract

This paper examines the time and frequency response characteristics of two-arm micromachined thermal actuators. Two types of thermal actuators are considered: hot/cold arm actuators and 'V' or 'chevron' shaped actuators. A heat transfer equation governing the temperature profile along the thermal actuators is derived. Equations for the thermal time constants and the frequency responses are presented. The thermal time constants and frequency responses are measured experimentally and compared to analytical predictions.