Concepedia

Publication | Closed Access

Scanning 2D micromirror with enhanced flatness at high frequency

DOI

21

Citations

0

References

2006

Year

Alexander Wolter, Thomas Klose, Shu-Ting Hsu, Harald Schenk, Hubert Lakner
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Abstract

Paper 61140L