Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 17 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMetrologyOptoelectronicsPhotonicsInterferometryOptical MetrologyOptical SensingTemperature MeasurementTemperature MetrologyTemperature SensorsGrating-based MetrologyInterferometric Expansion MeasurementMoire InterferometryNoncontact MeasurementNoncontact Measurement TechniquesNoncontact Surface MeasurementOptical InterferometryPeriodicity
A rapid, inexpensive temperature measurement scheme, applicable across a broad temperature range, based on noncontact measurement of the expansion of a grating structure on the surface of interest is demonstrated. A simple projection moiré technique is used to remotely determine the grating periodicity and, hence, the temperature. An optical Fourier transform technique is introduced to simplify the analysis. A sensitivity of ±0.5 °C for a grating length of 6 mm in a Si wafer around room temperature is demonstrated.