Publication | Closed Access
Effects of heat treatment on Ta2O5 sensing membrane for low drift and high sensitivity pH-ISFET
99
Citations
14
References
1996
Year
Electrical EngineeringBiomedical SensorsEngineeringApplied PhysicsSensor DesignThermal SensorHigh Sensitivity Ph-isfetHeat TreatmentSensor TechnologyLow Drift
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