Concepedia

Publication | Closed Access

Damage and defects from low-energy implants in Si

DOI

14

Citations

14

References

1996

Year

D. J. Eaglesham, Aditya Agarwal, T. E. Haynes, H.-J. Gossmann, D.C. Jacobson, J. M. Poate
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

Page 1