Magnetron sputter deposition and characterisation of Ti/TiN, Au/TiN and MoSX/Pb multilayers

M.C. Simmonds, H. Van Swygenhoven, E. Pflüger, Alan Savan, Roland Hauert, Lukas Knoblauch, S. Mikhailov

Surface and Coatings Technology · 1997 · 12 citations · 6 references

Concepts

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