Effects of substrate temperature and substrate material on the structure of reactively sputtered TiN films

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

Natural Sciences, Materials Engineering, Materials Science +12

Thin Film Phenomena

K. L. Chopra, Julius Klerrer · Journal of The Electrochemical Society · 1970 · 2K citations

The development of grain structure during growth of metallic films

C.R.M. Grovenor, H. T. G. Hentzell, D. A. Smith · Acta Metallurgica · 1984 · 399 citations

Natural Sciences, Materials Engineering, Materials Science +14

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson et al. · Thin Solid Films · 1983 · 275 citations

Natural Sciences, Materials Engineering, Materials Science +16

Phase Relationships in the Binary Systems of Nitrides and Carbides of Zirconium, Columbium, Titanium, and Vanadium

Pol Duwez, Francis Odell · Journal of The Electrochemical Society · 1950 · 219 citations

Natural Sciences, Chemistry, Materials Science +14