Concepedia

Low-temperature PECVD-deposited silicon nitride thin films for sensor applications

G. Suchaneck, Volkmar Norkus, Gerald Gerlach

Surface and Coatings Technology · 2001 · 31 citations · 20 references

DOI

Concepts

References

20

Infrared absorption strength and hydrogen content of hydrogenated amorphous silicon

A. A. Langford, M. L. Fleet, B. P. Nelson et al. · Physical review. B, Condensed matter · 1992 · 625 citations

, , +17

Chemical effects on the frequencies of Si-H vibrations in amorphous solids

G. Lucovsky · Solid State Communications · 1979 · 602 citations

, , +13

Mechanisms of Plasma‐Enhanced Silicon Nitride Deposition Using SiH4 /  N 2 Mixture

Haiping Dun, Paihung Pan, F. White et al. · Journal of The Electrochemical Society · 1981 · 139 citations

, , +17

Experimental determination of the absorption strength of C–H vibrations for infrared analysis of hydrogenated carbon films

W. Jacob, Marcus M. Unger · Applied Physics Letters · 1996 · 91 citations

, , +9

Effect of Nitridation of Silicon Dioxide on Its Infrared Spectrum

M. Naiman, Charles Kirk, Richard Aucoin et al. · Journal of The Electrochemical Society · 1984 · 69 citations

, , +17