Charging-Effects in RF capacitive switches influence of insulating layers composition

Low hydrogen content stoichiometric silicon nitride films deposited by plasma-enhanced chemical vapor deposition

Gregory N. Parsons, Jun H. Souk, J. Batey · Journal of Applied Physics · 1991 · 211 citations

Engineering, Optoelectronic Devices, Thin Film Process Technology +16

Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches

Xiaobin Yuan, James C. M. Hwang, David Forehand et al. · IEEE MTT-S International Microwave Symposium Digest, 2005. · 2005 · 113 citations

Electrical Engineering, Dielectrics, Engineering +10

Charging and discharging currents in polyvinylidene fluoride

D.K. Das-Gupta, K. Doughty, R S Brockley · Journal of Physics D Applied Physics · 1980 · 88 citations

Engineering, Charge Transport, Conducting Polymer +16

Distributed dielectric charging and its impact on RF MEMS devices

Xavier Rottenberg, Bart Nauwelaers, W. De Raedt et al. · AMS Acta (University of Bologna) · 2004 · 84 citations · Full text

Dielectrics, Engineering, Radio Frequency +18

Charging of radiation induced defects in RF MEMS dielectric films

M. Exarchos, E. Papandreou, P. Pons et al. · Microelectronics Reliability · 2006 · 27 citations

Electrical Engineering, Dielectrics, Engineering +8