Charging of radiation induced defects in RF MEMS dielectric films

Electrically active point defects in amorphous silicon nitride: An illumination and charge injection study

D. T. Krick, Patrick M. Lenahan, Jerzy Kanicki · Journal of Applied Physics · 1988 · 177 citations

Engineering, Materials Engineering, Materials Science +17

The effects of radiation on MEMS accelerometers

A.R. Knudson, S. Büchner, P.T. McDonald et al. · IEEE Transactions on Nuclear Science · 1996 · 78 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Radiation effects in micro-electromechanical systems (MEMS): RF relays

S. McClure, Larry D. Edmonds, R.E. Mihailovich et al. · IEEE Transactions on Nuclear Science · 2002 · 77 citations

Engineering, Electrical Engineering, Electromagnetics +4

Total dose effects on Microelectromechanical Systems (MEMS): accelerometers

C.I. Lee, A.H. Johnston, William C. Tang et al. · IEEE Transactions on Nuclear Science · 1996 · 68 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +16

Creation and annealing kinetics of magnetic oxygen vacancy centers in SiO2

R. A. B. Devine, A. Golański · Journal of Applied Physics · 1983 · 67 citations

Natural Sciences, Materials Engineering, Materials Science +17