Characterization of Surface Conductive Diamond Layer Grown by Microwave Plasma Chemical Vapor Deposition

Abstract

The electronic structure of the surface and defect density in diamond films as-grown and cooled in an oxygen ambient after deposition have been investigated by means of electron energy loss and electron spin resonance spectroscopies. As-grown diamond films contain an amorphous carbon phase and a larger amount of defects in the surface region compared with the bulk region.