Discharge voltage measurements during magnetron sputtering

Handbook of chemistry and physics

Journal of the Franklin Institute · 1930 · 11.7K citations

Natural Sciences, Chemistry, Physics +8

Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons

A. V. Phelps, Zoran Petrović · Plasma Sources Science and Technology · 1999 · 891 citations

Natural Sciences, Materials Science, Electronic Materials +15

Magnetron sputtering: basic physics and application to cylindrical magnetrons

John A. Thornton · Journal of Vacuum Science and Technology · 1978 · 361 citations

Natural Sciences, Electrical Engineering, Physics +10

Ion-induced electron emission from clean metals

R. A. Baragiola, E. Vereda Alonso, J. Ferrón et al. · Surface Science · 1979 · 279 citations

Natural Sciences, Materials Engineering, Materials Science +8

Planar magnetron sputtering

Robert K. Waits · Journal of Vacuum Science and Technology · 1978 · 239 citations

Natural Sciences, Electrical Engineering, Physics +13