Concepedia

Robert K. Waits

RK

9

Publications

365

Citations

9

H-Index

1969

Active since

Affiliations

Sunnyvale Public Library(Current)

Fairchild Semiconductor (United States)

Robert K. Waits is an author at Sunnyvale Public Library specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringMaterial ScienceMicroelectronicsEducationThin FilmsIntegrated CircuitsTechnologyMeasurement

Publications per year

1969–2007

9

Publications

9

Planar magnetron sputtering

Robert K. Waits · Journal of Vacuum Science and Technology · 1978 · 235 citations

Materials Science, Spintronics, Magnetism +14

Recommended practice for process sampling for partial pressure analysis

James E. Blessing, R.E. Ellefson, Bruce A. Raby et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2007 · 30 citations

Engineering, Mass Spectrometer, Measurement +19

Sputtered Silicon–Chromium Resistive Films

Robert K. Waits · Journal of Vacuum Science and Technology · 1969 · 27 citations

Materials Science, Material Analysis, Engineering +13

Silicide resistors for integrated circuits

Robert K. Waits · Proceedings of the IEEE · 1971 · 14 citations

Engineering, Silicide Resistors, Integrated Circuits +22

Semiconductor and thin film applications of a quadrupole mass spectrometer

Robert K. Waits · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 13 citations

Engineering, Measurement, Education +16

Rows per page

1–5 of 9