R.E. Ellefson

Recommended Practice for the Calibration of Mass Spectrometers

James A. Basford, M. D. Boeckmann, R.E. Ellefson et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 69 citations

Engineering, Pressure Measurement, Measurement +16

Miniature quadrupole residual gas analyzer for process monitoring at milliTorr pressures

David H. Holkeboer, T. L. Karandy, F. C. Currier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 50 citations

Engineering, Measurement, Gas Sensor +16

Mass spectrometric measurements on inductively coupled fluorocarbon plasmas: Positive ions, radicals and endpoint detection

Xi Li, M. Schaepkens, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 40 citations

Engineering, Atomic Emission Spectroscopy, Biological Mass Spectrometry +23

Hydrogen isotope analysis by quadrupole mass spectrometry

R.E. Ellefson, W. E. Moddeman, H.F. Dylla · Journal of Vacuum Science and Technology · 1981 · 39 citations

Isotope Analysis, Chemical Engineering, Engineering +15

Surface etching mechanism of silicon nitride in fluorine and nitric oxide containing plasmas

B. E. E. Kastenmeier, P. J. Matsuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 37 citations

Materials Science, Chemical Engineering, Engineering +15