Chemical bonding modifications of tetrahedral amorphous carbon and nitrogenated tetrahedral amorphous carbon films induced by rapid thermal annealing

R. McCann, Susanta Sinha Roy, Pagona Papakonstantinou, M.F. Bain, H.S. Gamble, James McLaughlin

Thin Solid Films · 2004 · 53 citations · 33 references

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