Superlattices and Microstructures · 2015 · 62 citations · 26 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsSemiconductor MaterialsThin FilmsAtomic Layer DepositionOxide SemiconductorsSemiconductor Thin FilmsThin Film AnnealingThin Film Optical PropertiesThin-film MaterialsAnnealing Temperature EffectsAnnealing Time EffectsFilm ThicknessOptical PropertiesSemiconductor Oxide Thin FilmsSilicon Thin FilmsSurface Optical PropertiesThin Oxide Films
26