Concepedia

Total electron scattering cross sections of CF4 and C2F6 in the energy range 100–1500eV

W. M. Ariyasinghe

Radiation Physics and Chemistry · 2003 · 20 citations · 9 references

DOI

Concepts

References

9

Plasma–surface interactions in fluorocarbon etching of silicon dioxide

Jeffery W. Butterbaugh, David Gray, Herbert H. Sawin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 110 citations

, , +17

Electron transport studies of gas mixtures for use in <i>e</i>-beam controlled diffuse discharge switches

S. R. Hunter, J. G. Carter, Loucas G. Christophorou · Journal of Applied Physics · 1985 · 98 citations

, , +17

Total cross section measurements for positrons and electrons colliding with molecules. I. SiH<sub>4</sub>and CF<sub>4</sub>

O Sueoka, Shigeki Mori, A. Hamada · Journal of Physics B Atomic Molecular and Optical Physics · 1994 · 77 citations

, , +10

Electron scattering from CF4 and CCl4. Total cross section measurements

Czesław Szmytkowski, A. Krzysztofowicz, Piotr Janicki et al. · Chemical Physics Letters · 1992 · 52 citations

, , +10

Additivity rule for the calculation of electron scattering from polyatomic molecules

Yuhai Jiang, Jinfeng Sun, Lingde Wan · Physical Review A · 2000 · 45 citations

, , +15