Jeffery W. Butterbaugh

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 330 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +11

Plasma–surface interactions in fluorocarbon etching of silicon dioxide

Jeffery W. Butterbaugh, David Gray, Herbert H. Sawin · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 106 citations

Chemical Engineering, Fluorocarbon Etching, Engineering +13

Measurement and analysis of radio frequency glow discharge electrical impedance and network power loss

Jeffery W. Butterbaugh, L. D. Baston, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 82 citations

Engineering, Radio Frequency, Glow Discharge +18

Monitoring and Control of Real Power in RF Plasma Processing

Gavin C. H. Zau, Jeffery W. Butterbaugh, Paul Rummel et al. · Journal of The Electrochemical Society · 1991 · 11 citations

Electrical Engineering, Engineering, Radio Frequency +6

All Wet Stripping of Implanted Photoresist

Kurt K. Christenson, Jeffery W. Butterbaugh, T. J. Wagener et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2007 · 10 citations

Engineering, Microfabrication, Wet Stripping +4