Symmetric toggle switch—a new type of rf MEMS switch for telecommunication applications: Design and fabrication

RF MEMS switches and switch circuits

Gabriel M. Rebeiz, Jeremy Muldavin · IEEE Microwave Magazine · 2001 · 956 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Micromachined low-loss microwave switches

Zhilin Yao, S. Chen, S. Eshelman et al. · Journal of Microelectromechanical Systems · 1999 · 390 citations

Engineering, Electrical Engineering, Materials Science +17

High-isolation CPW MEMS shunt switches. 1. Modeling

Jeremy Muldavin, Gabriel M. Rebeiz · IEEE Transactions on Microwave Theory and Techniques · 2000 · 362 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Electromechanical considerations in developing low-voltage RF MEMS switches

Dimitrios Peroulis, Sergio Pacheco, Kamal Sarabandi et al. · IEEE Transactions on Microwave Theory and Techniques · 2003 · 282 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Pull-in study of an electrostatic torsion microactuator

Ofir Degani, Eran Socher, Ariel Lipson et al. · Journal of Microelectromechanical Systems · 1998 · 242 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17