Publication | Closed Access
Micromachined piezoelectric membrane acoustic device
218
Citations
3
References
2002
Year
EngineeringMicrofabricationMechanical EngineeringAcoustic TweezerPiezoelectricityUltrasoundAcoustic Wave DevicesMicromachined Ultrasonic Transducer
| Year | Citations | |
|---|---|---|
Page 1
Page 1