Publication | Closed Access
The effects of the annealing temperature on the formation of helium-filled structures in silicon
40
Citations
11
References
1999
Year
Materials ScienceEngineeringPhysicsApplied PhysicsCondensed Matter PhysicsAnnealing TemperatureSiliceneDefect FormationSemiconductor Device FabricationSilicon On InsulatorHelium-filled StructuresMicrostructure
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