Concepedia

Helium desorption/permeation from bubbles in silicon: A novel method of void production

C.C. Griffioen, John H. Evans, P.C. de Jong

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 246 citations · 6 references

DOI

Concepts

References

6

On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures

Astrid Van Wieringen, N. Warmoltz · Physica · 1956 · 596 citations

, , +14

Precipitation in low energy helium irradiated molybdenum

J.H. Evans, W.Th.M. Buters, L. M. Caspers · Radiation Effects · 1983 · 50 citations

, , +12

Structural studies of hydrogen-bombarded silicon using ellipsometry and transmission electron microscopy

R. W. Collins, B. G. Yacobi, K. M. Jones et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 40 citations

, , +17

Passivation of laser induced defects in silicon by low energy hydrogen ion implantation

A. Slaoui, Abdelfettah Barhdadi, J.C. Müller et al. · Applied Physics A · 1986 · 19 citations

, , +12

Depth distributions of low-energy 4He implanted in solids

Hubert Gnaser, Helge L. Bay, Wolfgang Höfer · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1986 · 16 citations

, , +2