Effects of frequency of pulsed substrate bias on structure and properties of silicon-doped diamond-like carbon films by plasma deposition

Direct evaluation of the sp3 content in diamond-like-carbon films by XPS

Philippe Mérel, M. Tabbal, Mohamed Chaker et al. · Applied Surface Science · 1998 · 695 citations

Natural Sciences, Materials Engineering, Materials Science +6

Chemical effects on the frequencies of Si-H vibrations in amorphous solids

G. Lucovsky · Solid State Communications · 1979 · 602 citations

Natural Sciences, Chemistry, Physics +13

Surface reaction probabilities and kinetics of H, SiH3, Si2H5, CH3, and C2H5 during deposition of a-Si:H and a-C:H from H2, SiH4, and CH4 discharges

J. Perrin, Masaharu Shiratani, Patrick Kae-Nune et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 231 citations

Natural Sciences, Chemistry, Materials Science +17

Differentiating the tribological performance of hydrogenated and hydrogen-free DLC coatings

Helena Ronkainen, Simo Varjus, Jari Koskinen et al. · Wear · 2001 · 225 citations

Engineering, Materials Engineering, Materials Science +14

Tribological properties and characterization of diamond-like carbon coatings with silicon prepared by plasma-assisted chemical vapour deposition

Kazuyuki Oguri, Tohru Arai · Surface and Coatings Technology · 1991 · 195 citations

Engineering, Materials Engineering, Materials Science +16