Publication | Closed Access
Preparation of metal nitride and oxide thin films using shielded reactive vacuum arc deposition
31
Citations
6
References
2000
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsVacuum DeviceReactive VacuumThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMetal Nitride
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