Concepedia

Monte Carlo simulation of the particle transport process in sputter deposition

Tomoyoshi Motohiro, Yasunori Taga

Thin Solid Films · 1984 · 110 citations · 20 references

DOI

Concepts

References

20

Scientific foundations of vacuum technique

Vacuum · 1962 · 1.6K citations

, , +7

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Scientific Foundations of Vacuum Technique

Saul Dushman, Sanborn C. Brown · American Journal of Physics · 1962 · 840 citations

, , +7

New Class of Layered Materials

Iván K. Schuller · Physical Review Letters · 1980 · 565 citations

, , +13

Internal stresses in metallic films deposited by cylindrical magnetron sputtering

John A. Thornton, J. Tabock, David W. Hoffman · Thin Solid Films · 1979 · 250 citations

, , +16