Concepedia

Internal stresses in metallic films deposited by cylindrical magnetron sputtering

John A. Thornton, J. Tabock, David W. Hoffman

Thin Solid Films · 1979 · 250 citations · 17 references

DOI

Concepts

References

17

High Rate Thick Film Growth

John A. Thornton · Annual Review of Materials Science · 1977 · 2.1K citations

, , +12

Thin Film Phenomena

K. L. Chopra, Julius Klerrer · Journal of The Electrochemical Society · 1970 · 2K citations

Columnar microstructure in vapor-deposited thin films

A.G. Dirks, H. J. Leamy · Thin Solid Films · 1977 · 764 citations

, , +11

Stresses in thin films: The relevance of grain boundaries and impurities

R. W. Hoffman · Thin Solid Films · 1976 · 462 citations

, , +14

Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering

John A. Thornton, David W. Hoffman · Journal of Vacuum Science and Technology · 1977 · 298 citations

, , +17