Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor - Concepedia

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Electrical properties of hafnium silicate films obtained from a single-source MOCVD precursor

28

Citations

8

References

2004

Year

M. Lemberger, A. Paskaleva, Stefan Zürcher, Anton J. Bauer, L. Frey, H. Ryssel

Microelectronics Reliability

Materials EngineeringMaterials ScienceSingle-source Mocvd PrecursorMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsHafnium Silicate FilmsElectrical PropertiesChemical Vapor DepositionThin Film ProcessingElectrical Insulation

References

	Year	Citations

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