Science · 1992 · 77 citations · 18 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsPhotonicsSemiconductor MaterialsColor ImagingEtching ProcessesLuminescent MaterialsOptical ImagingSilicon MaterialsSilicon PhotonicsPhotoinduced LuminescencePhotoluminescencePorous SiliconSiliconSilicon Wafer ProcessingSilicon WafersThin Film Interference
Black and white images were projected onto n-type silicon (100) wafers during a photoelectrochemical etch to produce a color image that photoluminesces. The photoluminescence originates from a thin layer of luminescent porous silicon that is produced in the photoetch, and the colors that appear in the etched image arise from thin-film optical interference. A diffraction grating was also photoetched into the substrate, demonstrating simultaneous encoding of a gray-scale image into thin-film interference, luminescence, and diffraction phenomena.
18
Porous silicon formation: A quantum wire effect
V. Lehmann, U. Gösele · Applied Physics Letters · 1991 · 1.9K citations
Natural Sciences, Materials Engineering, Materials Science +17
Porosity and Pore Size Distributions of Porous Silicon Layers
R. Hérino, G. Bomchil, K. Barla et al. · Journal of The Electrochemical Society · 1987 · 566 citations