Competitive kinetic processes during homoepitaxial growth on Ge(111)

Tatsuo Yokotsuka, Mark Richard Wilby, Dimitri D. Vvedensky, T. Kawamura, Katsuyuki Fukutani, Shuichi Ino

Applied Physics Letters · 1993 · 23 citations · 10 references

Concepts

Abstract

The homoepitaxial growth of Ge(111) has been investigated with reflection high-energy electron diffraction (RHEED) measurements supported by Monte Carlo simulations. At low temperatures, the RHEED oscillations show a monolayer period, while at higher temperatures the oscillation period becomes bilayer. The simulations reveal that a short-range nonthermal diffusion process is dominant at low temperatures, and that the driving force behind the transition to bilayer growth is the increasing importance of thermal diffusion.

References

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