Residual stresses in nitride hard coatings prepared by magnetron sputtering and arc evaporation

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

Natural Sciences, Materials Engineering, Materials Science +12

The preparation of thin films by physical vapour deposition methods

K. Reichelt, Xin Jiang · Thin Solid Films · 1990 · 259 citations

Natural Sciences, Materials Engineering, Materials Science +11

Residual compressive stress in sputter-deposited TiC films on steel substrates

A. V. Pan, J. E. Greene · Thin Solid Films · 1981 · 88 citations

Natural Sciences, Materials Engineering, Materials Science +16

On the origin of compressive stress in PVD coatings — an explicative model

O. Knotek, R. Elsing, Gustavo Raúl Kramer et al. · Surface and Coatings Technology · 1991 · 85 citations

Natural Sciences, Materials Engineering, Materials Science +16

Nitrogen, oxygen, and argon incorporation during reactive sputter deposition of titanium nitride

D. S. Williams, F. A. Baiocchi, R. C. Beairsto et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +14