MicroXY stages with spider-leg actuators for two-dimensional optical scanning

The scattering of electromagnetic waves from rough surfaces

B.I. Mityashev · USSR Computational Mathematics and Mathematical Physics · 1964 · 797 citations

Natural Sciences, Electrical Engineering, Physics +14

A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process

Hiroshi Toshiyoshi, Guo-Dung J. Su, Jason Lacosse et al. · Journal of Lightwave Technology · 2003 · 80 citations

Engineering, Materials Science, Actuators +14

Stacked two dimensional micro-lens scanner for micro confocal imaging array

Sunghoon Kwon, L.P. Lee · 2003 · 61 citations

Engineering, Mechanical Engineering, Biomedical Imaging +11

Novel polysilicon comb actuators for xy-stages

V.P. Jaecklin, Christian Linder, N. F. de Rooij et al. · 1992 · 42 citations

Engineering, Electrical Engineering, Mechanical Engineering +17