Stacked two dimensional micro-lens scanner for micro confocal imaging array

Abstract

The concept of micro confocal imaging array is proposed and a stacked two-dimensional microlens scanner has been developed. The 2D raster scanner consists of two 1D scanners fabricated in silicon on insulator wafers stacked perpendicularly. Each scanner has a biconvex surface tension induced polymer microlens. Line scanning ranging 75 /spl mu/m at 4.5 kHz and 2D raster scanning over an area of 40 /spl mu/m /spl times/ 40 /spl mu/m are demonstrated at the focal point of the lens, which is equivalent to a maximum of 11/spl deg/ beam steering.