RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys - Concepedia

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RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

22

Citations

7

References

1994

Year

W. De Coster, Bert Brijs, H. Bender, J. L. Alay, Wilfried Vandervorst

Materials EngineeringIon ImplantationEngineeringSige AlloysPhysicsXps AnalysisApplied PhysicsIon BeamSilicon On InsulatorIon Emission

References

	Year	Citations

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