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Experimental study of surface generation and force modeling in micro-grinding of single crystal silicon considering crystallographic effects

Materials ScienceSingle Crystal SiliconEngineeringMicromechanicsMicrofabricationMechanicsMaterial MachiningMechanical EngineeringApplied PhysicsSurface GenerationContact MechanicSolid MechanicsForce ModelingSoft MatterNanotribologyMechanics Of MaterialsMicrostructure