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Fabrication of long hexagonal micro-lens array by applying gray-scale lithography in micro-replication process

Materials ScienceGray-scale LithographyEngineeringOphthalmologyMicroscopyMaterials FabricationMicrofabricationMedicineFabrication TechniqueBeam LithographyBiomedical EngineeringMicro-optical ComponentNanolithography MethodMicrofluidicsMicro-replication Process3D PrintingDiffractive Optic