M. Edward Motamedi

Antireflection surfaces in silicon using binary optics technology

M. Edward Motamedi, W. H. Southwell, W. J. Gunning · Applied Optics · 1992 · 172 citations

Short Wavelength Optic, Optical Materials, Engineering +17

Integrated silicon microbeam PI-FET accelerometer

Pau-Ling Chen, R.S. Muller, R.D. Jolly et al. · IEEE Transactions on Electron Devices · 1982 · 99 citations

Electrical Engineering, Engineering, Microfabrication +12

Micro-opto-electro-mechanical systems

M. Edward Motamedi · Optical Engineering · 1994 · 91 citations

Engineering, Mechanical Engineering, Biomedical Engineering +16

Micro-opto-electro-mechanical devices and on-chip optical processing

M. Edward Motamedi · Optical Engineering · 1997 · 58 citations

Optical Materials, Engineering, Micro-optical Components +18

Determination of semiconductor surface properties using surface acoustic waves

P. Das, M. Edward Motamedi, R.T. Webster · Applied Physics Letters · 1975 · 28 citations

Semiconductors, Materials Science, Electrical Engineering +15