Silicon Mach–Zehnder waveguide interferometers based on the plasma dispersion effect

Abstract

Silicon Mach–Zehnder waveguide modulators have been fabricated and operation characterized at the wavelength of 1.3 μm. Device operation is based on the free-carrier-induced change in the refractive index of silicon. Modulation depths of −4.9 dB and response times τresponse<50 ns have been achieved at λ=1.3 μm for an injected carrier density of 6.5×1017 cm−3.