An electrothermally excited dual beams silicon resonant pressure sensor with temperature compensation

Resonant silicon sensors

Göran Stemme · Journal of Micromechanics and Microengineering · 1991 · 289 citations

Engineering, Materials Engineering, Materials Science +17

High $Q$-Factor In-Plane-Mode Resonant Microsensor Platform for Gaseous/Liquid Environment

Jae‐Hyeong Seo, Oliver Brand · Journal of Microelectromechanical Systems · 2008 · 145 citations

Engineering, Materials Science, Mechanical Engineering +16

The Resonistor: A Frequency Selective Device Utilizing the Mechanical Resonance of a Silicon Substrate

Roman Wilfinger, Paul H. Bardell, D. S. Chhabra · IBM Journal of Research and Development · 1968 · 84 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Silicon resonant accelerometer with electronic compensation of input-output cross-talk

Vittorio Ferrari, A. Ghisla, D. Marioli et al. · Sensors and Actuators A Physical · 2005 · 71 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

Performance of thermally excited resonators

T.S.J. Lammerink, R.H. Van Ouwerkerk, S. Bouwstra et al. · Sensors and Actuators A Physical · 1990 · 64 citations · Full text

Engineering, Electrical Engineering, Heat Transfer +6