Synthesis and properties of tantalum nitride films formed by ion beam assisted deposition

Structure of Tantalum Nitrides

Nobuzo Terao · Japanese Journal of Applied Physics · 1971 · 175 citations

Natural Sciences, Materials Engineering, Materials Science +12

Low-temperature formation of metastable cubic tantalum nitride by metal condensation under ion irradiation

Wolfgang Ensinger, Masato Kiuchi, Mamoru Satou · Journal of Applied Physics · 1995 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +17

Properties of direct current magnetron reactively sputtered TaN

Bhola N. Mehrotra, Jim Stimmell · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 51 citations

Engineering, Electrical Engineering, Materials Science +17

Glow discharge mass spectrometry of sputtered tantalum nitride

C. R. Aita, Tiffany Myers, W. J. LaRocca · Journal of Vacuum Science and Technology · 1981 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +14

Effect of ion and atom masses on the crystallographic orientation of nitride films prepared by ion-beam-assisted deposition

Wolfgang Ensinger, Masato Kiuchi, Mamoru Satou · Surface and Coatings Technology · 1994 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +17