Effect of ion and atom masses on the crystallographic orientation of nitride films prepared by ion-beam-assisted deposition

Use of ion beam assisted deposition to modify the microstructure and properties of thin films

F.A. Smidt · International Materials Reviews · 1990 · 411 citations

Natural Sciences, Materials Engineering, Materials Science +17

Theory of thin-film orientation by ion bombardment during deposition

R. Mark Bradley, James Harper, D. A. Smith · Journal of Applied Physics · 1986 · 236 citations

Natural Sciences, Materials Science, Physics +15

Technology and applications of broad-beam ion sources used in sputtering. Part II. Applications

J. M. E. Harper, J. J. Cuomo, H. R. Kaufman · Journal of Vacuum Science and Technology · 1982 · 215 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of ion bombardment during deposition on the x-ray microstructure of thin silver films

T. C. Huang, G. Lim, F. Parmigiani et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1985 · 177 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Ion beam assisted thin film deposition

J. K. Hirvonen · Materials Science Reports · 1991 · 166 citations

Natural Sciences, Materials Engineering, Materials Science +13