Microfabrication of PPy microactuators and other conjugated polymer devices

Abstract

Conjugated polymers have a number of interesting properties that can be exploited in microfabricated sensors and actuators. For example, polypyrrole is a conjugated polymer that can change volume to deliver significant stresses and strains. These materials can be patterned using conventional microfabrication techniques. The procedures for doing this are described in this paper, focusing on the microfabrication of polypyrrole microactuators. In addition, other methods for the deposition and patterning of conjugated polymers are reviewed. A special technique for releasing actuators, differential adhesion, is also detailed.