Nuclear Instruments and Methods in Physics Research · 1983 · 61 citations · 27 references
EngineeringNuclear EngineeringPhysicsPlasma PhysicsRadiation PhysicsHighly Charged IonsIon ImplantationIonization ChambersIonization ProcessesBeam FocusingFocused Ion Beam PatterningIon Optics
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Erwin W. Müller · The Physics Teacher · 1966 · 389 citations
A high-intensity scanning ion probe with submicrometer spot size
R. L. Seliger, J. W. Ward, V. Wang et al. · Applied Physics Letters · 1979 · 266 citations
Ion source of high brightness using liquid metal
V. E. Krohn, G. R. Ringo · Applied Physics Letters · 1975 · 205 citations