Rapid heat treatment for spin coated ITO films by electron plasma annealing method

Masatoshi Wakagi, Ken-ichi Chahara, Ken‐ichi Onisawa, Yukio Kawakubo, Toshimichi Kichikawa, Tadashi Satoh, Tetsuroh Minemura

Thin Solid Films · 2002 · 12 citations · 7 references

Concepts

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