Microsystem Technologies · 2012 · 16 citations · 13 references
EngineeringElectrical EngineeringMechanical EngineeringActuatorsMechatronicsMicroelectromechanical SystemsElectrostatic ActuationElectrostatic ActuatorsMems ActuatorsMems DesignMems FabricationMicroelectromechanical SensorsAccelerometer CharacterizationAccelerometersActuator FeedbackElectrostatic Mems ActuatorsFeedback Control Of Electrostatic Actuators
13
A novel rotary acceleration sensor
Ivan Godler, Akira Akahane, K. Ohnishi et al. · IEEE Control Systems · 1995 · 32 citations
Engineering, Mechanical Engineering, Robotics Engineering +10