Publication | Closed Access
Sidewall transfer lithography for reliable fabrication of nanowires and deca-nanometer MOSFETs
39
Citations
6
References
2008
Year
Electrical EngineeringDeca-nanometer MosfetsEngineeringBeam LithographyMicrofabricationNanoelectronicsNanotechnologyReliable FabricationApplied PhysicsPattern TransferSemiconductor Device FabricationNanometrologySidewall Transfer LithographyElectronic PackagingMicroelectronicsNanolithography Method
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