In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

TEM Sample Preparation and FIB-Induced Damage

Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino et al. · MRS Bulletin · 2007 · 873 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +6

Recent advances in FIB–TEM specimen preparation techniques

Jian Li, T. Malis, S. Dionne · Materials Characterization · 2006 · 185 citations

Natural Sciences, Materials Engineering, Materials Science +9

Fibxtem— Focussed Ion Beam Milling for TEM Sample Preparation

David P. Basile, Ron Boylan, Brian Baker et al. · MRS Proceedings · 1991 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +13

Cross-Sectional TEM Specimen Preparation of Semiconductor Devices by Focused Ion Beam Etching

Kyung‐Ho Park · MRS Proceedings · 1990 · 36 citations

Engineering, Materials Engineering, Materials Science +14

Method for Cross-sectional Transmission Electron Microscopy Specimen Preparation of Composite Materials Using a Dedicated Focused Ion Beam System

Toshie Yaguchi, Takeo Kamino, Tohru Ishitani et al. · Microscopy and Microanalysis · 1999 · 32 citations

Engineering, Materials Engineering, Materials Science +15