Anti-sticking treatment for a nanoimprint stamp

Estimation of the surface free energy of polymers

D.K. Owens, R. C. Wendt · Journal of Applied Polymer Science · 1969 · 9.2K citations

Natural Sciences, Chemistry, Physics +17

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments

Roya Maboudian, W. Robert Ashurst, Carlo Carraro · Sensors and Actuators A Physical · 2000 · 377 citations

Engineering, Materials Engineering, Materials Science +15

Surface engineering and microtribology for microelectromechanical systems

K. Komvopoulos · Wear · 1996 · 365 citations

Engineering, Materials Science, Mechanical Engineering +14

Growth kinetics of decanethiol monolayers self-assembled on Au(111) by molecular beam deposition: An atomic beam diffraction study

Peter Schwartz, Frank Schreiber, P. Eisenberger et al. · Surface Science · 1999 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +17