Wear of silicon surfaces in MEMS

Reaction of water with hydrofluoric acid treated silicon(111) and (100) surfaces

D. Gräf, M. Grundner, Robert Schulz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 270 citations

Surface Characterization, Chemical Engineering, Engineering +15

In situ friction and wear measurements in integrated polysilicon mechanisms

K.J. Gabriel, F. Behi, R. Mahadevan et al. · Sensors and Actuators A Physical · 1990 · 171 citations

Materials Science, Engineering, Wear Testing +9

Lubrication of digital micromirrordevicesTM

Steven A. Henck · Tribology Letters · 1997 · 140 citations

Friction and wear characteristics of electrodeposited nanocrystalline nickel–tungsten alloy films

A.S.M.A. Haseeb, U. Albers, Klaus J. Bade · Wear · 2007 · 106 citations

Materials Engineering, Materials Science, Engineering +5

Effect of surface chemistry on the tribological performance of a MEMS electrostatic lateral output motor

Steven T. Patton, William D. Cowan, Kalathil C. Eapen et al. · Tribology Letters · 2001 · 106 citations